Metrology & Instrumentation
Optical Interferometric Profilers - Systems

• Accurate and Affordable Non-Contact Surface Topography
• Superior Non-Destructive 3D Surface Profiling and Analysis Enables Cost-Effective Production and Quality Control

• Easy-to-Use Platform Delivers Rapid and Efficient Process Monitoring
• Comprehensive and Intuitive Software Provides Sample and Application Flexibility

• Characterize Large Shapes and Critical Angles
• Collect High-Density, 3D Areal Information

• Measure with Nanometer Resolution
• Perform Rapid Data Acquisition

Features & Benefits

• Provides fast data acquisition, user-friendly data analysis, and angstrom-level repeatability
• Features compact size, flexible, expandable configuration and motorized, programmable stage
• Sub-nanometer vertical resolution at all magnifications
• Complete system including Wyko Vision® analysis software and X-Y stage automation option

• Precise surface topography in a small footprint
• Stitching capabilities for large area measurements
• Superior, nanoscale-level accuracy in a tabletop profiler
• Increased throughput
• Versatility to handle a wide range of demanding non-contact research and testing applications
• PV-specific stage and chuck optimizes profiler for edge-to-edge, 6-inch crystalline silicon PV cell metrology, enabling better production and process development

Features:

• Excellent speed and range from 0.1 nanometer up to 10 millimeters, with sub-nanometer vertical resolution
• Proprietary internal laser reference provides continuous self-calibration to minimize dependence on step standards and compensate for system drift  
• Comprehensive suite of automation tools with user-friendly interface
• Industry-leading Wyko Vision® automation and analysis software
• Fastest measurement speed in the industry

Benefits:

• Excellent accuracy in all types of environments including non-contact 3D surface measurements
• Easy to use – fits many applications; reduces operator training and preparation time
• Maximizes throughput and ramp to high-volume production

Features:

• Sub-nanometer resolution and measurement range from 0.1 nanometer up to 10 millimeters
• Extended, large scan capability
• Proprietary dual-LED source
• Motorized, programmable, XYZ axes and a unique tip/tilt head
• Industry-leading Vision® software with automated measurement sequences and more than 200 built-in analyses

Benefits:

• Fast, accurate, high-quality 3D surface maps of tested objects
• Ideal for large-region, stitched, and irregular samples
• Increased intensity and longer source lifetime for optimal performance with any measurement
• Rapid production measurement – ideal for large-scale ramp-ups
• Offers total solution for either research or production testing/monitoring
• Flexibility to meet expanding, changing needs

Features:

• Third-generation, large-format surface profiling system
• Automated, non-contact 3D inspection
• Extremely rapid data acquisition and fast image processing
• Larger stage design accommodating panels up to 600 x 600 mm
• Improved, user-friendly production interface
• Customizable imaging recipes
• Field-proven advanced automation

Benefits:

• Unprecedented measurement performance and capability
• Ideal for 3D critical dimension measurements in large-format applications.
• Higher-throughput in-line process monitoring
• Accuracy for a wide range of large formats
• Easy to use and suited for custom configurations

Features:

• Third-generation, large-format surface profiling system
• Automated, non-contact 3D inspection
• Extremely rapid data acquisition and fast image processing
• Larger stage design accommodating panels up to 600 x 600 mm
• Improved, user-friendly production interface
• Customizable imaging recipes
• Field-proven advanced automation

Benefits:

• Unprecedented measurement performance and capability
• Ideal for 3D critical dimension measurements in large-format applications.
• Higher-throughput in-line process monitoring
• Accuracy for a wide range of large formats
• Easy to use and suited for custom configurations

Features:

• Advanced Wyko NT Series optical profiling technology now available in a stand-alone module
• Stand-alone system allows non-contact, gauge-capable metrology
• Interfaces easily with production systems (mechanical, electrical and data)

Benefits:

• Meets critical measurement requirements of magnetic recording heads, rolled steel, print rolls, fiber optics, optical filters and many other applications
• Superior throughput, speed, and automation to support high-volume manufacturing
• Allows in-situ production measurement and 100% sampling