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Epitaxial Equipment : MOCVD Systems

TurboDisc E475 As/P MOCVD System

TurboDisc E475 As/P MOCVD System
Enabling highest volume production of premium devices

Get the industry's leading throughput for high-volume production of HB-LEDs, laser diodes, pHEMTs, HBTs, and III-V concentrator solar cells, with the Veeco TurboDisc® E475 As/P. This superb metal organic chemical vapor deposition (MOCVD) system delivers increased capacity and improved cost of ownership over previous systems. The E475 system also improves product quality, productivity and yield, and can easily be upgraded to the E450 As/P.

TurboDisc E475 As/P MOCVD System
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  • Industry's leading throughput is now available for mass production of HB-LEDs, concentrator solar cells, laser diodes, pHEMTs, and HBTs
  • Sophisticated vacuum load-lock automation for long production cycles and highest productivity
  • Integrated RealTemp® 200 technology provides direct, automated closed-loop wafer temperature control -- assures process reproduceability
  • FlowFlange® offers discrete injection zones with individual flow matching, for excellent uniformity and repeatability

   Contact Veeco for detailed specifications