Epitaxial Equipment : MOCVD Systems

The new TurboDisc® E475 As/P Metal Organic Chemical Vapor Deposition (MOCVD) system with industry's leading throughput is now available for mass production of HB-LED and Concentrator Solar cells. The E475 system capability can be upgraded to existing E-450 As/P system protecting the customer's initial investment. The next-generation E475 drives forward the MOCVD technology roadmap for high volume production of HB-LEDs and III-V concentrator solar cells by delivering 15% increased capacity and improved cost of ownership metrics compared with the TurboDisc E450 System.

Veeco's TurboDisc As/P MOCVD tools offer a level of process control and reliability unmatched by competing MOCVD technologies and are being adopted by the industry for cost of ownership benefits for high volume production of mulit-junction III-V concentrator solar cells, red, orange and yellow HB-LEDs, laser diodes, pHEMTs and HBTs. These technically advanced MOCVD systems feature Veeco's integrated RealTempR 200 technology, enabling superior material quality and process efficiency from direct wafer temperature control, fast gas switching for strict control of interface abruptness, and vacuum load-lock automation for highest productivity.