Epitaxial Equipment

 

GEN II MBE System   
The world's premier single-wafer molecular beam epitaxy (MBE) system, with more than 220 operational systems worldwide. 

 

GEN III MBE System   
With its 14 effusion cell ports, the GEN III is today's most popular MBE system for R&D and low-volume production.

 

GEN10 MBE System   
The GEN10™ is an ultra flexible MBE system for materials research, integrating designs from Veeco's industry-leading family of cluster tool MBE systems.

 

GEN20 MBE System   
Ultra flexible MBE system for materials research and pilot production, available as a fully automated cluster tool or a manual transfer system.

 

GEN200 Edge MBE System   
Cluster MBE tool with the industry's most cost effective 4x4" epiwafer growth of such devices as pump lasers, VCSELs and HBTs.

 

GEN2000 Edge MBE System   
Cluster MBE tool with superior throughput for high-volume manufacturing of wireless telecommunications devices such as HBTs and pHEMTs.

 

GEN930 MBE System   
High performance, cost-effective and flexible MBE system for materials research with 11 ports.