Metrology & Instrumentation
Epitaxial Equipment
Process Equipment
Solutions for a nanoscale world.™

Epitaxial Equipment
MBE Systems - Systems

Previous Product
View Next Product
Next Product
Resources & Learning
 
News and Updates
     
 

Latest News

Epitaxial Equipment
GEN10 Automated R&D MBE System - Wafers up to 1x3"
GEN10 Automated R&D MBE System
New
 
 

Features

  • Automated architecture
  • Application flexibility
  • Economical upgrade path
  • Built on nine years of reliable cluster tool technology

Benefits

  • Automated wafer transfer enables high system utilization, allowing multiple researchers to use the system at the same time and perform unattended growths and calibrations
  • Economical upgrade path to additional growth modules, maximum of three
  • Configurable, material specific growth modules in a cluster architecture enable growth of incompatible materials in one vacuum system
  • Direct process path to larger production MBE systems
GEN20 R&D / Pre-Production MBE System - Wafers 1x3", 1x4", 3x2"
GEN20 R&D / Pre-Production MBE System  
 

Features

  • Vertical source substrate geometry for optimum material capacity of sources
  • Configurable cryopanel, manipulator, shutters, and in-situ monitoring equipment 
  • 12 MBE source ports with option to include e-beam capabilities
  • Multiple, large, direct-coupled pumping ports
  • Economical upgrade path to additional growth modules, maximum of two
  • Manual or automatic transfer

Benefits

  • Maximum uptime
  • Better control and greater purity of growth environment
  • Enables advanced research on wide variety of challenging materials
  • Efficient research and process development at a low cost of ownership
  • Option to add automated cluster tool in the future 
GEN200 Edge Production MBE System - Wafers 1x8", 1x6", 4x4", 7x3", 14x2"
GEN200 Edge Production MBE System  
 

Features:

  • Automated, modular architecture
  • Design allows for up to two growth modules
  • Optional bulkhead installation, to separate load lock modules from cluster tool and growth modules

Benefits:

  • Proven lowest cost multi-4" system in industry
  • Significantly smaller footprint than comparable MBE tools
  • High throughput
  • Allows for processing of incompatible materials
  • Easier maintenance
  • Reliable design
GEN2000 Edge Production MBE System - Wafers 3x8", 7x6", 14x4", 23x3"
GEN2000 Edge Production MBE System  
 

Features:

  • Automated, modular architecture
  • Design allows for up to two growth modules
  • Optional bulkhead installation, to separate load lock modules from cluster tool and growth modules

Benefits:

  • Proven industry's lowest cost per wafer processing
  • 40%-60% smaller footprint than comparable MBE systems
  • Greatly increased throughput
  • Allows for processing of incompatible materials
  • Easy maintenance
  • Optimizes cleanroom space
  • Reliable design
GEN930 R&D MBE System - Wafers up to 1x3"
GEN930 R&D MBE System  
 

Features

  • Up to 1x3" wafer processing
  • Modular design
  • Integrates wide range of in-situ monitoring techniques
  • 11 source ports on tilted vertical geometry 
  • Incorporates technology of Veeco GEN II MBE system, which holds GaAs and AlGaAs performance records

 

Benefits

  • Maximum flexibility in choosing arrangement of source materials
  • Maximum choice of monitoring techniques
  • Expandable system capabilities as needed
  • Based on production-proven technology
GEN II R&D MBE System - Wafers up to 1x3"
GEN II R&D MBE System  
 

Features:

  • Radial-vane source cryopanel complements standard growth chamber cryopanel
  • Pneumatically actuated source shutters
  • Easily accommodates various analyical techniques
  • Precise substrate rotation with accurate beam equivalent pressure measurement

Benefits:

  • Cost-effective and efficient system ideal for research and product development
  • Well suited to high-quality, high-purity optoelectronic materials applications
  • Superior facility and application flexibility
  • Record-setting track record with more than 220 systems in operation worldwide