Epitaxial Equipment : MBE Systems

GEN200 Edge Production MBE System

Wafers 1x8", 1x6", 4x4", 7x3", 14x2"

Veeco's GEN200 Edge is the most cost-effective and highest-capacity multi-4" production MBE system in the market today. The system delivers superior throughput, long campaigns and excellent wafer quality in growing GaAs- or InP-based wafers for such devices as pump lasers, VCSELs and HBTs.

Description

GEN200 Edge Production MBE System		More Information

Delivers the lowest-cost 4X4" epiwafer growth Modular architecture allows significantly smaller footprint than comparable MBE tools Allows for up to two growth modules, increasing throughput or allowing processing of incompatible materials Optional bulkhead installation optimizes cleanroom space Incorporates the industry's most innovative, reliable system hardware, sources and components		Contact Veeco for detailed specifications