Epitaxial Equipment : MBE Systems

GEN10 Automated R&D MBE System

Wafers up to 1x3"

The most economical, flexible cluster tool system, in a proven platform, allows for up to three configurable, material specific growth modules. This enables high system utilization allowing multiple researchers to use the system at the same time and perform unattended growths and calibrations.

Description

GEN10 Automated R&D MBE System		More Information

Automated wafer transfer enables high system utilization, allowing multiple researchers to use the system at the same time and perform unattended growths and calibrations Economical upgrade path to additional growth modules, maximum of three Configurable, material specific growth modules in a cluster architecture enable growth of incompatible materials in one vacuum system Direct process path to larger production MBE systems		Contact Veeco for detailed specifications