Metrology & Instrumentation
Epitaxial Equipment
Process Equipment
Solutions for a nanoscale world.™

Epitaxial Equipment

MBE Sources - Systems

Dopant  
Dopant   

For precise and stable control of fluxes for MBE dopant constituents, or for an economical MBE gas source for gases that do not require thermal cracking, Veeco's Dopant products are ideal.

 
High Temperature  
High Temperature   

Get reliable high-temperature MBE source capabilities at high temperatures -- up to 2000º Celsius -- with Veeco's reliable, proven high temperature sources, available in a range of sizes.

 
Low Temperature  
Low Temperature   

Achieve accurate and consistent low temperature epitaxial source performance for a wide variety of MBE applications through Veeco's low temperature epitaxial sources.

 
Medium Temperature  
Medium Temperature   

Find a medium-temperature MBE source for virtually any application -- from specialized hot-lip SUMO sources to economical standard filament for thermal effusion -- with this lineup of Veeco products.

 
Specialty  
Specialty   

Discover a range of solutions for specialized MBE source gas needs with Veeco's proven Specialty sources.