MBE Sources
Dopant - Systems

Features:

• Compact, with small thermal mass
• Optimized for precise, stable control of relatively low fluxes
• Conical crucible features large taper angle to avoid beam collimation
• Highly efficient cell heating

Benefits:

• Ideally suited for accurate, reproducible MBE performance
• Enhanced reproducibility and fast stabilization for advanced doping profiles
• Excellent flux uniformity across an entire platen
• Expanded range of doping elements available in a single source port

Features:

• Large conductance tube and diffuser end plate
• Band heater, external to vacuum, for consistent source heating
• Can be combined on a single mounting flange with an Atomic Hydrogen Source or 5cc Dopant Source
• Gas injector is heated by the source or hydrogen-cracking filament

Benefits:

• Provides low-cost means to introduce a gas without thermal pre-cracking
• Excellent growth uniformity
• Ideal gas injector for CBr₄, NH₃, and other gases that do not require thermal pre-cracking
• Increased process versatility and enhanced MBE system capabilities