Epitaxial Equipment : MBE Components

Due to white phosphorus's extreme reactivity with oxygen, Veeco's Phosphorus Recovery System (PRS) provides a safe, efficient means of trapping and neutralizing white phosphorus from the growth module prior to venting an MBE system for maintenance and/or source reloading. The process is controlled and closely monitored through Veeco Molly® Growth Control Software.

The Veeco PRS is available in two models to accommodate low volume or high volume manufacturing environments.