Epitaxial Equipment : MBE Components

UNI-Bulb RF Plasma Source Autotuner

Automated solution for MBE plasma source optimization

Hands-free MBE plasma source operation is a reality with Veeco's UNI-Bulb plasma source autotuner, which automatically adjusts and maintains optimal plasma source conditions -- even if your operating conditions frequently change. A direct replacement for the popular Veeco manual tuner, this tuner works with existing power supplies and is an excellent material delivery system for oxide and nitride applications due to UNI-Bulb stability, reproducibility, and energy-efficiency.

Description

UNI-Bulb RF Plasma Source Autotuner		More Information

Enables hands-free MBE operation -- automatically adjusts and maintains optimal plasma source conditions Eliminates need for manual adjustments during experimentation; ideal for applications where operating conditions frequently change Automated version of popular, proven Veeco RF plasma source Excellent material delivery systems for oxide and nitride -- good stability, reproducibility, and energy-efficiency		Contact Veeco for detailed specifications