Epitaxial Equipment : MBE Components

Substrate Heaters

TAILORED FOR SPECIFIC TEMPERATURE AND GROWTH ENVIRONMENTS

Veeco offers application-specific substrate heaters tailored for specific temperature and growth environment conditions. The standard design utilizes a PBN diffuser plate and sophisticated wire filament that provides consistent cross-sectional uniformity and efficient power consumption.

Description

MBE Substrate Heaters

More Information

Excellent thermal uniformity
Efficient power consumption
Clean operation
Multiple filament materials available
Application specific design and materials
Extended life for oxygen and ammonia environments
Dual filament heaters available

Contact Veeco for detailed specifications

Data Sheets

Ammonia Resistant Sources and Heaters
Low Res [49 KB pdf ]
Oxygen Resistant Sources and Heaters
Low Res [48 KB pdf ]