Metrology & Instrumentation
Process Equipment
Epitaxial Equipment
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Epitaxial Equipment : MBE Components

MBE Shutter Controllers

MBE Shutter Controllers

These units control shutter position (open/close) with Veeco molecular beam epitaxy (MBE) effusion cell, source flange and integral shutters. Control is manual via front panel switches on the rack-mounted controller, or remote via a computer using TTL-compatible inputs. Each shutter controller can be paired with an air distribution system that drives the equivalent number of shutters. Solenoid-driven, two-way manifolds enable pneumatic distribution, with each shutter actuated by two separate push-open/push-close pneumatic lines. Opening and closing pressures are independently regulated. A maximum pressure of 50-80 psi of dry N2 or filtered compressed air is required.