Epitaxial Equipment : MBE Components

Veeco provides a comprehensive and integrated software control solution for both research and production MBE systems in our Molly® Growth Control Software and Lot Manager™ Scheduling Software.  For research applications, Molly provides sophisticated recipe control and monitoring to automate the growth process. For production applications, Lot Manager is utilized in conjunction with Molly to control automated wafer transfer, working in concert with Molly to manage the production process.

NEW Molly ECS1 Growth Control Software

The new ECS1™ release of the Molly® Growth Control Software incorporates many features that provide better usability and hardware control.  It is available both on new systems and as an upgrade to existing systems.

• EpiTrend "always-on" data archiver and display allows comparison of current and historical data and incorporates our Liberator™ feature allowing you to review logs and data offline—preserving system up-time
• Extended scripting language allows more control over programming
• Recipe checking and diagnostics allow setup and readiness verification to minimize product scrap
• Integration of k-Space Associate's kSA BandiT™ provides temperature and "confidence level" and expansion capability for other signals
• Flexible architecture allows new components and instruments to be easily integrated

Lot Manager Scheduling Software

Lot Manager is an easy to use and robust platform in which to control the operation of Veeco's automated production MBE systems. Utilizing highly flexible lot and run sheets, Lot Manager can easily be configured to automatically control platen transfer from module to module and to initiate growth recipes according to the process defined by the user.