Metrology & Instrumentation : AFM / SPM : Modes : Electrical Characterization Modes

Conductive Atomic Force Microscopy (CAFM) is a secondary imaging mode derived from contact AFM that characterizes conductivity variations across medium- to low-conducting and semiconducting materials. CAFM performs general-purpose measurements, and has a current range of 2 pA to 1 µA. CAFM employs a conductive probe tip. Typically, a DC bias is applied to the tip, and the sample is held at ground potential. While the z feedback signal is used to generate a normal contact AFM topography image, the current passing between the tip and sample is measured to generate the conductive AFM image.



Current flow in conductive AFM (CAFM).